Ceramic thin film thickness determination by nano-indentation

摘要

Nano-indentation acts as a microprobe for the determination of mechanical properties of very small volumes of materials. Oliver and Pharr [1] and more recently Felder et cil. [2] published methods to calculate Young's modulus and hardness of the indented material. The low loads used and consequently the depths which are involved (several tens of nanometers) make nano-indentation very useful to determine the properties of coatings a few microns thick.