Development of Multilayer Readout Wiring TES Calorimeter for Future X-ray Missions

摘要

We have fabricated multilayer readout wiring transition edge sensors (TES), which enable us to realize both large effective area and high-energy resolution for future X-ray astrophysical missions, such as diffuse intergalactic oxygen surveyor. By sandwiching a SiO_2 insulation layer between Al superconducting signal and return lines, self/mutual inductances and self fielding of bias leads are expected to be reduced. We fabricated 4 × 4 and 20 × 20 TES array on the multilayer wiring and tested their performance. Under the low temperature condition, several pixels in the TES array showed sharp superconducting transitions at around ～300 mK. We also succeeded in detecting X-ray signals from the 4 × 4 TES, contrary to the previous results of 20 × 20 TES. We further investigated the reasons for the differences between the 4 × 4 TES and the 20 × 20 TES, and present future plans for improving the multilayer TES array fabrication.