XTEM study of Al doped TiO2 anatase epitaxial films deposited on MgO by pulsed laser deposition

摘要

Al doped TiO2 anatase films epitaxially grown byPulsed Laser Depositon (PLD) on MgO single crystal substrateshave been studied by cross-section transmission electronmicroscopy. The main structural features of such films are thecolumnar morphology of the anatase grains and the formation of aspinel buffer layer at the TiO2/MgO interface. The spinel layer isAl rich and displays a steep gradient in Mg composition.Correlation between the microstructure and the optical propertiesof the films is presented also.