CHEMICAL VAPOUR GROWTH OF HFC WHISKERS AND THEIR MORPHOLOGY

摘要

HfC whiskers were prepared from a gas mixture of HfCl4 + CH4 + H-2 + Ar in the presence of metal impurities, and the growth conditions and morphology were examined. The HfC whiskers preferentially grew at an H/Cl ratio of above 8, an HfCl4 gas flow rate of 10-20 standard cm(3) min(-1), a CH4 flow rate of 10-20 standard cm(3) min(-1), and at temperatures above 1050 degrees C. HfC whiskers, 60-170 mu m long, with a ball-like tip and periodically varying diameters, were obtained at 1250 degrees C using a cobalt impurity. [References: 16]