Application of ion irradiation for surface finish of micro-forming die

摘要

Fabrication and surface treatment of die are important issues for micro-metal forming. Ion beam irradiation was applied as a new process for surface finish of micro-die after the machining in this paper. Ar ion plasma by electron cyclone resonance (ECR) equipment was utilized for the irradiation process. Roughness and mechanical properties (Young's modulus and hardness) of the surface was measured by using a confocal scanning laser microscope and a nanoindentation, respectively. Furthermore, durability of the die was evaluated through a piercing test on a press machine. Experimental results show that the ion irradiation is very effective to reduce the surface roughness due to the machining process. The durability was improved corresponding to reduction of surface roughness.