Machining a micro/meso scale structure using a minaturized machine tool by using a conventional cutting process

摘要

Microlmeso scale parts, connectors, and couplers in optic communication and arbitrary 3D features are required in various fields of industry. In this paper a miniaturized machine tool is developed to machine arbitrary 3D features in the micro/meso scale based on CNC and PC-NC technology. In the proposed system, a PI controller with antiwindup capability is adopted which helps microlmeso scale machining of components.- For performance evaluation, a V groove and a 3D feature are machined using the proposed miniaturized machine tool.