The Effect of Various Electrolyte Concentrations on Surface and Electrical Characteristic of the Copper Deposition Layer at Anodizing of Titanium Anode

摘要

Recently, the requirement for the ultra thin copper foil increases with smaller and miniaturized electronic components. Therefore, it is important to examine the surface state of substrate depending on the processing parameter during the anodic oxidation. This study investigated the effect of the various electrolyte concentrations on anodizing of titanium anode prior to copper electrodeposition. Different surface morphology of anodized titanium was obtained at different electrolytic concentration 0.5 M to 3.0 M. In addition, the effect that the surfaces and the electrical characteristics on the electrodeposited copper layer was observed. In this study, surface anodized in the group containing 0.5 M H_2SO_4 shows more uniform copper crystals with low surface roughness. the surface roughness and sheet resistance for 0.5 M H_2SO_4 group were 1.353 mu m and 0.104 m OMEGA /sq, respectively.