Study of the Effect of Process Induced Uncertaintieson the Performance of a Micro-Comb Resonator

摘要

This paper presents a modeling technique based on the integration in the classicdeterministic simulation methods of probabilistic computational techniques such as uncertaintyanalysis and sensitivity analysis. As study case, it is presented a micro-comb resonator that isactuated electrostatically to vibrate in the plane parallel to the substrate. A deterministic FiniteElement coupled electromechanical analysis is performed to evaluate the mode shapes and thecorresponding eigenfrequencies of the mobile mass and afterwards a Monte Carlo simulation isused to determine the dispersion of the eigenfrequency of the mode shape of interest in function ofthe variations of the input parameters. The scatter of the results is analyzed and then it is presented asensitivity analysis for establishing which of the input parameters have more influence on thevariability of the microresonators performance.