High-speed orientation microscopy with offline solving sequences of EBSD patterns

摘要

A high speed in acquisition of backscatter Kikuchi patterns (BKP) and solving the stored raw patterns offline has many advantages over online EBSD. No compromise is made betweenspeed and reliability. Automated backscatter Kikuchi diffraction in the scanning electronmicroscope (SEM) is about to become a tool for process and quality control. Mandatoryrequirements for these applications are measures to enable re-examination of the results at any timeand a high speed. Therefore, fast acquisition of pattern sequences and offline indexing will soonbecome standard. Online pattern solving is optional, but at the disadvantage of reduced speed andreliability.