A Preliminary Electron Backscatter Diffraction Study of Microstructures and Microtextures Evolution during Au Stud and Flip Chip Thermosonic Bonding

摘要

Microstructures and microtextures of the gold wire, free air ball, Au studbumps and flip chip bonding bumps were analyzed using Electron Backscatter Diffraction (EBSD). It is demonstrated that process parameters, such as bonding power, force and temperature have significant influences on the microstructure and microtexture of gold bumps. The non-uniform deformation, the associated microstructure defects and the local textures of the Au bumps under the vertical force and the horizontal ultrasonic wave applied are presented and discussed.