Toward a Better Understanding of Synthesis and Processing of Ceramic/Self-Assembled Monolayer Bilayer Coatings

摘要

Ceramic/self-assembled monolayer(SAM)bilayer coatings can provide adequate protection for silicon devices,or act as a multipurpose coating for other electronic applications,due to synergistic effects by forming a hybrid coating structure.The organic SAM layer acts as a "template" for the growth of the ceramic layer,while the ceramic layer can provide protection from environmental and mechanical impact.Low-temperature solution-based deposition techniques,namely,an in-situ solution method(biomimetic)and a hydrothermal method,have been employed in this study.Specifically,phosphonate-based(di-ethyl phosphatoethyl triethoxy silane)SAMs were used as a template to generate a zirconia ceramic layer at low temperatures.Other organic templates such as-SiCl_3-,-OH-,-HSO_3-,or-CH_3-terminated SAMs were also examined.The reactions to grow the ceramic film were found to be pH sensitive.The ceramic and SAM coatings were characterized by a variety of analytical techniques.A pathway for the formation of the ceramic coating is also discussed.