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首页> 外文期刊>Journal of Electronic Materials >Physical Structure of Molecular-Beam Epitaxy Growth Defects in HgCdTe and Their Impact on Two-Color Detector Performance
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Physical Structure of Molecular-Beam Epitaxy Growth Defects in HgCdTe and Their Impact on Two-Color Detector Performance

机译:HgCdTe中分子束外延生长缺陷的物理结构及其对双色检测器性能的影响

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摘要

The flexible nature of molecular-beam epitaxy (MBE) growth is beneficial for HgCdTe infrared-detector design and allows for tailored growths at lower costs and larger focal-plane array (FPA) formats.Control of growth dynamics gives the MBE process a distinct advantage in the production of multicolor devices,although opportunities for device improvement still exist.Growth defects can inhibit pixel performance and reduce the operability in FPAs,so it is important to understand and evaluate their properties and impact on detector performance.The object of this paper is to understand and correlate the effects of macrodefects on two-color detector performance.We observed the location of single-crystal and polycrystalline regions on planar and cross-sectioned surfaces of two-color device structures when void defects were viewed by scanning electron microscopy (SEM).Compositional analysis via energy dispersive x-ray analysis (EDXA) of voids in the cross section showed elevated Te and reduced Hg when compared to defect-free growth areas.The second portion of this study examined the correlation of macrodefects with pixel operability and diode current-voltage (I-V) characteristics in mid-wavelength infrared (MWIR)/MWIR (M/M) and long wavelength infrared (LWIR)TLWIR (L/L) two-color devices.The probability of diode failure when a void is present is 98% for M/M and 100% for L/L.Voids in two-color detectors also impact diodes neighboring their location;the impact is higher for L/L detectors than M/M detectors.All void-containing diodes showed early breakdown in the I-V characteristics in one or both bands.High dislocation densities were observed surrounding voids;the high density spread further from the void for L/L detectors compared to M/M detectors.
机译:分子束外延(MBE)生长的灵活特性有利于HgCdTe红外探测器的设计,并允许以较低的成本和更大的焦平面阵列(FPA)格式进行定制的生长。生长动力学的控制使MBE工艺具有明显的优势。在多色器件的生产中,尽管仍然存在器件改进的机会。生长缺陷会抑制像素性能并降低FPA的可操作性,因此了解和评估其性能以及对检测器性能的影响非常重要。为了了解和关联宏观缺陷对双色检测器性能的影响,当通过扫描电子显微镜(SEM)观察到空隙缺陷时,我们观察了双色区域在双色器件结构的平面和横截面上的位置通过能量色散X射线分析(EDXA)对横截面中的空隙进行成分分析,结果表明Te升高而降低与无缺陷生长区域相比汞含量高。这项研究的第二部分研究了中波长红外(MWIR)/ MWIR(M / M)和长波长时宏观缺陷与像素可操作性和二极管电流-电压(IV)特性的相关性。波长红外(LWIR),TLWIR(L / L)两色器件。当存在空隙时,二极管的故障概率为M / M为98%,L / L为100%。两色检测器中的空隙也会影响二极管邻近的位置;对于L / L检测器的影响要比M / M检测器大。所有含空隙的二极管在一个或两个频带中的IV特性都显示出早期击穿;在空隙周围观察到高位错密度;高密度进一步扩散从L / L检测器的空隙到M / M检测器的空隙。

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