Development of Fuses for Protection of Geiger-Mode Avalanche Photodiode Arrays

摘要

Current-limiting fuses composed of Ti/Al/Ni were developed for use in Geiger-mode avalanche photodiode arrays for each individual pixel in the array. The fuses were designed to burn out at similar to 4.5 x 10(-3) A and maintain post-burnout leakage currents less than 10(-7) A at 70 V sustained for several minutes. Experimental fuse data are presented and successful incorporation of the fuses into a 256 x 64 pixel InP-based Geiger-mode avalanche photodiode array is reported.