Optimal control of arrays of microcantilevers

摘要

In this paper we will present a model for an array of microcantilevers that are used in Atomic Force Microscopy and nano-scale manufacturing. The microcantilevers are connected to each other through a common base, and are individually actuated.The sensors are also integrated on each microcantilever. We consider the problem of controlling a tightly packed array of identical microcantilevers that are dynamically coupled. This system is an example of a spatially-invariant system with a distributed array of sensors and actuators. We exploit the spatial invariance of the problem to design optimal H{sub}2 controllers for this array. An analytic expression for the optimal controller is derived in the transformed domain, and estimates of the couplingrange of the controller is obtained.