首页> 外文期刊>Journal of Computational and Nonlinear Dynamics >Reduced Order Model Analysis of Frequency Response of Alternating Current Near Half Natural Frequency Electrostatically Actuated MEMS Cantilevers
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Reduced Order Model Analysis of Frequency Response of Alternating Current Near Half Natural Frequency Electrostatically Actuated MEMS Cantilevers

机译:交流电频率响应的近阶自然频率静电致动MEMS悬臂梁降阶模型分析

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This paper uses the reduced order model (ROM) method to investigate the nonlinear-parametric dynamics of electrostatically actuated microelectromechanical systems (MEMS) cantilever resonators under soft alternating current (AC) voltage of frequency near half natural frequency. This voltage is between the resonator and a ground plate and provides the actuation for the resonator. Fringe effect and damping forces are included. The resonator is modeled as a Euler-Bernoulli cantilever. ROM convergence shows that the five terms model accurately predicts the steady states of the resonator for both small and large amplitudes and the pull-in phenomenon either when frequency is swept up or down. It is found that the MEMS resonator loses stability and undergoes a pull-in phenomenon (1) for amplitudes about 0.5 of the gap and a frequency less than half natural frequency, as the frequency is swept up, and (2) for amplitudes of about 0.87 of the gap and a frequency about half natural frequency, as the frequency is swept down. It also found that there are initial amplitudes and frequencies lower than half natural frequency for which pull-in can occur if the initial amplitude is large enough. Increasing the damping narrows the escape band until no pull-in phenomenon can occur, only large amplitudes of about 0.85 of the gap being reached. If the damping continues to increase the peak amplitude decreases and the resonator experiences a linear dynamics like behavior. Increasing the voltage enlarges the escape band by shifting the sweep up bifurcation frequency to lower values; the amplitudes of losing stability are not affected. Fringe effect affects significantly the behavior of the MEMS resonator. As the cantilever becomes narrower the fringe effect increases. This slightly enlarges the escape band and increases the sweep up bifurcation amplitude. The method of multiple scales (MMS) fails to accurately predict the behavior of the MEMS resonator for any amplitude greater than 0.45 of the gap. Yet, for amplitudes less than 0.45 of the gap MMS predictions match perfectly ROM predictions.
机译:本文使用降阶模型(ROM)方法研究在频率接近自然频率一半的软交流电(AC)电压下,静电驱动微机电系统(MEMS)悬臂谐振器的非线性参数动力学。该电压在谐振器和接地板之间,为谐振器提供驱动。附带边缘效应和阻尼力。谐振器建模为Euler-Bernoulli悬臂。 ROM收敛表明,五项模型可以准确地预测谐振器的稳态,无论振幅大小,无论是上扫还是下扫,都可以预测到拉入现象。发现MEMS谐振器会失去稳定性并会发生拉入现象(1)约0.5%的间隙振幅和小于一半自然频率的频率(随频率扫频),以及(2)约25%的振幅。间隔为0.87,频率大约是自然频率的一半,因为该频率被扫低了。还发现,如果初始振幅足够大,则存在一些初始振幅和频率低于自然频率的一半,则可能发生吸合。增加阻尼会缩小逃逸带,直到不会出现拉入现象,仅会出现约0.85的大幅度振幅。如果阻尼继续增加,则峰值幅度将减小,并且谐振器将经历线性动力学行为。通过将向上扫描的分叉频率移至更低的值,增加电压会扩大逃逸带;失去稳定性的幅度不受影响。边缘效应会显着影响MEMS谐振器的性能。随着悬臂的变窄,条纹效应增加。这稍微扩大了逸出带并增加了向上的分叉幅度。多尺度方法(MMS)不能准确预测MEMS谐振器在大于0.45间隙的任何幅度下的行为。然而,对于小于间隙的0.45的幅度,MMS预测与ROM预测完全匹配。

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