Disc-shaped nanocrystal model for simulating the diffraction peak profile from a one-dimensional superlattice and its application to Pt/AlN superlattice films

摘要

On the basis of the film structure of a Pt/AlN multilayer film which exhibits a superlattice peak after annealing, a disc-shaped nanocrystal model is proposed for simulating the diffraction line profile from a one-dimensional superlattice. The proposed model demonstrates that a superlattice peak can arise even from just two disc-shaped nanocrystals and even with a large misorientation (a few degrees), provided both the thickness and the in-plane crystal size of the nanocrystals are of the order of nanometres. Using the model, the superlattice peaks from Pt/AlN superlattices are analysed quantitatively and the effect of annealing on the film is discussed.