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Rotation contour contrast reconstruction using electron backscatter diffraction in a scanning electron microscope

机译:扫描电子显微镜中使用电子背散射衍射的旋转轮廓对比度重建

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The microstructure of a deformed Mg-Al-Ca alloy was imaged using an electron-beam energy of 20 keV in a cold field-emission scanning electron microscope. The backscattered electron (BSE) micrographs showed a non-uniform contrast, the simplest being in the form of parallel contours inside a number of grains. This contrast is described as rotation contour contrast (RCC) and is attributed to local rotation of the crystal during the deformation of the grain. A model is presented to relate the rotation of crystal planes about one rotation axis to the channeling contrast in the channeling pattern and, consequently, to RCC in the BSE micrograph. This model was validated with the electron backscatter diffraction technique such that the RCCs in the BSE micrograph were reconstructed using the electron backscatter diffraction pattern intensities. The appearance of the RCCs was attributed to the change in the electron-beam position across a Kikuchi band due to local crystal rotation.
机译:在冷场发射扫描电子显微镜中使用20 keV的电子束能量对变形的Mg-Al-Ca合金的显微组织进行成像。背散射电子(BSE)显微照片显示出不均匀的对比度,最简单的形式是在许多晶粒内部具有平行轮廓。这种对比度称为旋转轮廓对比度(RCC),归因于晶粒变形过程中晶体的局部旋转。提出了一种模型,该模型将晶体平面绕一个旋转轴的旋转与通道模式中的通道对比度以及BSE显微照片中的RCC相关联。通过电子背散射衍射技术验证了该模型,从而利用电子背散射衍射图样强度重建了BSE显微照片中的RCC。 RCC的出现归因于由于局部晶体旋转导致的跨菊池带的电子束位置的变化。

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