A method for the non-destructive analysis of gradients of mechanical stresses by X-ray diffraction measurements at fixed penetration/information depths

摘要

A rigorous measurement strategy for (X-ray) diffraction stress measurements at fixed penetration/information depths has been developed. Thereby errors caused by lack of penetration-depth control in traditional (X-ray) diffraction (sin(2)psi) measurements have been annulled. The range of accessible penetration/information depths and experimental aspects have been discussed. As a practical example, the depth gradient of the state of residual stress in a sputter-deposited nickel layer of 2 mu m thickness has been investigated by diffraction stress measurements with uncontrolled penetration/information depth and two controlled penetration/information depths corresponding to about one quarter and one tenth of the layer thickness, respectively. The decrease of the planar tensile stress in the direction towards the surface could be well established quantitatively.