Determination par diffraction des rayons X de la texture et des contraintes dans des revetements de chrome dope au carbone realises par pulverisation cathodique magnetron

摘要

Vapor deposited chromium doped carbon tin films are highly fiber textured and their major orientation depends on the growth parameters and in particular, on the substrate bias voltage. The strong texture does not allow to apply the well known sin_2Ψ -method stress determination technique using X-ray. Two methods will be used and compared: the Ideal Directions Method and the Single Crystal Stress Analysis. The growth Parameters effect will be studied with different X-ray techniques. The fiber texture presents an inclination in connection with the columnar morphology and the substrate position according to the long target axis. The growth parameters such as the substrate bias voltage and the target power have a strong influence on the residual stress distribution.