Etude morphologique d'agregats inclus dans des couches minces superficielles par diffusion centrale des rayons X en incidence rasante

摘要

Among surface analysis techniques and specially those using X-rays, the most recent is the grazing incidence small-angle X-ray scattering (GISAXS). Full potentialities of this non-destructive technique are obtained when using a synchrotron source and when patterns are recorded with Imaging Plates. It is then possible to study the shape, the size and the spatial distribution of aggregates deposited on a flat substrate or embedded in a thin layer. We show the case of some carbon-metal layers when the solubility of carbon in the metal is weak. GISAXS patterns show that metallic aggregates embedded in a carbon matrix are elongated along the growth direction of the thin film. Results obtained with granular multilayers (magnetic cobalt aggregates in an alumina matrix) are also given. In this second case, it is shown that a spatial order exists not only in every layer, but also between the successive layers. It allows to show the particular and well-ordered structure of those multilayers.