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Vapor phase deposition using a plasma spray process

机译:使用等离子喷涂工艺进行气相沉积

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Plasma spray - physical vapor deposition (PS-PVD) is a low pressure plasma spray technology to deposit coatings out of the vapor phase. PS-PVD is part of the family of new hybrid processes recently developed by Sulzer Metco AG (Switzerland) on the basis of the well established low pressure plasma spraying (LPPS) technology. Included in this new process family are plasma spray - chemical vapor deposition (PS-CVD) and plasma spray - thin film (PSTF) processes. In comparison to conventional vacuum plasma spraying (VPS) and low pressure plasma spraying (LPPS), these new processes use a high energy plasma gun operated at a work pressure below 2 mbar. This leads to unconventional plasma jet characteristics which can be used to obtain specific and unique coatings. An important new feature of PS-PVD is the possibility to deposit a coating not only by melting the feed stock material which builds up a layer from liquid splats but also by vaporizing the injected material. Therefore, the PS-PVD process fills the gap between the conventional physical vapor deposition (PVD) technologies and standard thermal spray processes. The possibility to vaporize feedstock material and to produce layers out of the vapor phase results in new and unique coating microstructures. The properties of such coatings are superior to those of thermal spray and EB-PVD coatings. In contrast to EB-PVD, PS-PVD incorporates the vaporized coating material into a supersonic plasma plume. Due to the forced gas stream of the plasma jet, complex shaped parts like multi-airfoil turbine vanes can be coated homogeneously with columnar thermal barrier coatings using PS-PVD. This paper reports on the progress made by Sulzer Metco to develop a thermal spray process to produce coatings out of the vapor phase.
机译:等离子喷涂-物理气相沉积(PS-PVD)是一种低压等离子喷涂技术,用于将涂层沉积到气相之外。 PS-PVD是苏尔寿美科公司(瑞士)最近在成熟的低压等离子喷涂(LPPS)技术的基础上开发的新型混合工艺系列的一部分。该新工艺系列包括等离子喷涂-化学气相沉积(PS-CVD)和等离子喷涂-薄膜(PSTF)工艺。与传统的真空等离子喷涂(VPS)和低压等离子喷涂(LPPS)相比,这些新工艺使用在2 mbar以下的工作压力下运行的高能等离子枪。这导致非常规的等离子流特性,可用于获得特定而独特的涂层。 PS-PVD的一个重要的新功能是不仅可以通过熔化由液体碎片形成一层的原料来沉积涂层,还可以通过蒸发注入的材料来沉积涂层。因此,PS-PVD工艺填补了传统物理气相沉积(PVD)技术和标准热喷涂工艺之间的空白。汽化原料材料并产生气相之外的层的可能性导致了新的和独特的涂层微观结构。此类涂料的性能优于热喷涂和EB-PVD涂料。与EB-PVD相比,PS-PVD将汽化的涂层材料结合到超音速等离子羽流中。由于等离子流的强制气流,可以使用PS-PVD用圆柱状的热障涂层均匀地涂覆复杂形状的零件(如多翼型涡轮叶片)。本文报道了苏尔寿美科在开发热喷涂工艺以生产气相之外的涂层方面所取得的进展。

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