Morphological features of diamond films depending on substrate temperatures via a low pressure polymer precursor process in a hot filament reactor

摘要

Diamond films were synthesized at low pressure using phenylcarbyne polymer as a precursor in a hotfilament reactor. The morphological features of diamond films at different substrate temperatureswere investigated by scanning electron microscopy (SEM). Various diamonds, such as microcrystals,flake-like crystals and whiskers were observed. The variation mainly depends on the substratetemperature.