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The influence of grain-boundaries on the electronic performance of CVD diamond films

机译:晶界对CVD金刚石薄膜电子性能的影响

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摘要

CVD diamond shows interesting perspectives for the production of high-performance radiation detectors and electronic devices. However, due to a polycrystalline structure, the performance of CVD diamond-based devices may be hampered by the low signal-to-noise ratio associated with high level of conductivity. We consider that the level of conductivity correlates with the presence of graphitic impurities within the polycrystalline samples. Assuming that this graphitic phase is concentrated in the free volume of the interfacial crystal grain-boundaries, we show that the graphitic contamination and bulk leakage conductivity can be reduced by increasing the nucleation density. This effect is mainly due to a better filling of the interfacial space by smaller grains induced during the first stage of CVD deposition process. The 60 mu m-thick films were structurally characterized, using Raman spectroscopy and X-ray diffraction (XRD), and electrically by the analysis of room temperature (RT) conductivity and charge collection efficiency, extracted from low-energy X-ray irradiation (8.05 keV).
机译:CVD金刚石显示出用于生产高性能辐射探测器和电子设备的有趣观点。但是,由于具有多晶结构,CVD金刚石基器件的性能可能会因与高电导率相关的低信噪比而受到阻碍。我们认为电导率水平与多晶样品中石墨杂质的存在有关。假设该石墨相集中在界面晶粒边界的自由体积中,我们表明可以通过增加成核密度来降低石墨污染和整体泄漏电导率。该效果主要归因于在CVD沉积过程的第一阶段中由较小的晶粒更好地填充了界面空间。用拉曼光谱和X射线衍射(XRD)对60微米厚的膜进行结构表征,并通过分析低能X射线辐照( 8.05 keV)。

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