Fricton coefficient measurements By LFM on DLC films as function of sputtering deposition parameters

摘要

Diamond-like carbon (DLC) coatings are widely used as protective overcoats on space junctions, magnetic media dna magnetic head slides in hard disk-drive systems, etc. In the present work, the friction coefficient of DLC films was investigated by lateral force microscopy (LFM) as a function of sputtering deposition parameters. The lateral force acts on the pyramidal tip attached to the end of the cantilever, due to friction or viscous forces, resulting in cantilever measurable torsion and deflection, related to the friction's magnitude. The relationship among data fro friction coefficient distribution on DLC films surface with flow of precursor gases, surface composition, morphology structure, hardness and elastic module parameters was evaluated. Characterization techniques such as Raman scattering spectroscopy (RSS), X-ray photoelectron spectroscopy (XPS) and nanoindentation were used. The results have showed good agreement with the literature for DLC tribological parameters.