DLC FILM DEPOSITION METHOD AND DLC FILM DEPOSITION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a DLC (Diamond Like Carbon) film deposition method and a DLC film deposition apparatus, capable of reducing the film deposition cost of a DLC by using inexpensive raw material gas.;SOLUTION: A Sabatier reaction chamber 20 is stored inside a processing chamber 3. A catalyst is stored in the Sabatier reaction chamber 20. Carbon dioxide gas and hydrogen gas is filled in the reaction part 22, and when the temperature in the reaction part 22 is high, the Sabatier reaction is executed in the reaction part 22 to generate methane gas and steam. The methane gas generated in the Sabatier reaction chamber 20 is supplied into the processing chamber 3, and used as raw material gas for DLC film deposition.;COPYRIGHT: (C)2012,JPO&INPIT