Biased enhanced growth of nanocrystalline diamond films by microwave plasma chemical vapor deposition

摘要

Smooth nanocrystalline diamond thin films with rms surface roughness of approx 17 nm were grown on silicon substrates at 600 deg C using biased enhanced growth (BEG) in microwave plasma chemical vapor deposition (MPCVD). The evidence of nanocrystallinity, smoothness and purity was obtained by characterizing the samples with a combination of Raman spectroscopy, X-ray diffraction (XRD), atomic force microscopy and Auger electron spectroscopy The Raman spectra of the films exhibit an intense band near 1150 cm~(-1) along with graphitic bands. The former Raman band indicates the presence of nanocrystalline diamond. XRD patterns of the films show broad peaks corresponding to inter-planar spacing of (111) and (220) planes of cubic diamond supporting the Raman results. Auger line shapes closely match with the line shape of diamond suggesting high concentration of sp~3 carbon on the surfaces of the films. The growth of dominantly sp~3 carbon by BEG in the MPCVD system at the conditions used in the present work can be explained by the subsurface implantation mechanism while considering some additional effects from the high concentration of atomic hydrogen in the system.