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Substrate surface temperature as a decisive parameter for diamond-like carbon film adhesion to polyethylene substrates

机译:基材表面温度是类金刚石碳膜与聚乙烯基材粘合的决定性参数

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摘要

Protective diamond-like carbon coatings (DLCs) deposited on polymer substrates represent a promising means for modification of the substrate surface. Application of strong DLCs on these substrates is rendered difficult due to a large difference in their thermal expansion coefficients, and also to the low heat resistance and thermal conductivity of most polymers. Vacuum pulsed sputtering of graphite is among the methods which show greatest promise for creation of DLCs on such substrates. In this method it is possible to adjust, within broad limits, the mean sputtering rate, and consequently control the thermal load on the substrate during sputtering. We measured the temperature distribution in bulky high-density polyethylene (PE) substrates depending on the pulse repetition rate and the number of pulses in the carbon source. The data were used to determine optimal conditions for deposition of DLCs on PE. DLCs almost 0.1 μm thick were deposited in two stages. In the first stage, when the best adhesion was provided, the source power was a maximum. In the second stage the source power was an order of magnitude lower. Adhesion of the DLCs to the substrates was evaluated using the standard adhesive tape test and by resistance to thermal cycling in the intervals from 77 to 287 K and 77 to 373 K. Adhesion of the DLCs to PE was shown to be strongly dependent on the substrate temperature at the start of sputtering. The best result was achieved when the substrate temperature was nearly equal to, but did not exceed, the PE melting point.
机译:沉积在聚合物基材上的类金刚石保护性碳涂层(DLC)代表了一种用于修饰基材表面的有前途的手段。由于它们的热膨胀系数差异很大,而且大多数聚合物的耐热性和导热性低,因此很难在这些基材上使用强力DLC。真空脉冲溅射石墨是最有希望在此类基板上形成DLC的方法之一。在这种方法中,可以在较宽的范围内调节平均溅射速率,从而控制溅射过程中基板上的热负荷。我们根据脉冲重复频率和碳源中脉冲的数量,测量了大体积高密度聚乙烯(PE)基板中的温度分布。数据用于确定DLC在PE上沉积的最佳条件。分两步沉积厚度约为0.1μm的DLC。在第一阶段,当提供最佳粘附力时,源功率最大。在第二阶段,源功率降低了一个数量级。使用标准胶带测试并通过在77至287 K和77至373 K之间的热循环阻力来评估DLC与基材的粘合性。显示DLC与PE的粘合性强烈依赖于基材溅射开始时的温度。当基材温度接近但不超过PE熔点时,可获得最佳结果。

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