CO SENSING CHARACTERISTICS OF REACTIVELY SPUTTERED SNO2 THIN FILMS PREPARED UNDER DIFFERENT OXYGEN PARTIAL PRESSURE VALUES

摘要

Thin films of tin oxide (SnO2) have been deposited by means of RF sputtering from a pure SnO2 target onto alumina substrates in an Ar/O-2 mixture. Different oxygen contents in the sputtering atmosphere were used, in order to achieve the best thin films properties for CO detection. Films with the best sensitivity were obtained with 30% oxygen. The optimum operating temperature of the realized devices was about 270 degrees C. Copyright (C) 1996 Elsevier Science Ltd [References: 7]