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首页> 外文期刊>Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology >YBCO/LSMO and LSMO/YBCO double-layer deposition by off-axis magnetron sputtering and strain effects
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YBCO/LSMO and LSMO/YBCO double-layer deposition by off-axis magnetron sputtering and strain effects

机译:离轴磁控溅射YBCO / LSMO和LSMO / YBCO双层沉积及应变效应

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摘要

We report here on ferromagnetic/superconductor FM/SC and SC/FM double layers deposited without a buffer layer between FM and SC. Thin films of La0.7Sr0.3MnO3 (LSMO) are used for the FM, and YBa2Cu3O7-x (YBCO) for the SC. Both films can grow crystalline on SrTiO3 (STO) or LaAlO3 (LAO) substrates in high temperature and in oxygen atmosphere conditions. Magnetic and transport measurements and X-ray diffraction analysis are used to characterise film quality and properties. It is shown that off-axis magnetron sputtering can be used for high-quality double layer deposition. A prerequisite for this is the suppression of the interdiffusion process. This is achieved by lowering the deposition temperature and shortening the deposition time for the top layer. Lattice relaxation for LSMO films deposited on LAO substrates is seen. It is demonstrated that post-deposition annealing or additional top layer deposition enlarges the relaxed part of the lower LSMO film. LSMO films are smooth and free of imperfections and the stress is partly relieved by the formation of misfit dislocations. For YBCO films, SEM, XRD, EDX and magnetisation characterisations show that film lattice relaxation starts when single-element-oxide crystals start to grow into the film. Many experiments give evidence of a critical thickness of about 30 nm of a strained layer, after which the top part of the YBCO film relaxes. Despite the small compositional deviation due to the interdiffusion, the YBCO/LSMO double films demonstrate high enough transport and magnetic properties to allow their application in the investigation of the injection of spin-polarised quasiparticles from FM to SC film. The critical current for YBCO film is J(c) similar to 0.7 x 10(6) A/cm(2) if it is a bottom layer, and J(c) similar to 1.7 x 10(6) A/cm(2) if YBCO is a top layer, whilst our optimal single-layer YBCO films have J(c) similar to (2.5-5) x 10(6) A/cm(2) at 77 K. (C) 2002 Elsevier Science Ltd. All rights reserved. [References: 11]
机译:我们在这里报告铁磁性/超导体FM / SC和SC / FM双层沉积,而FM和SC之间没有缓冲层。 FM使用La0.7Sr0.3MnO3(LSMO)薄膜,SC使用YBa2Cu3O7-x(YBCO)薄膜。两种膜都可以在高温和氧气气氛下在SrTiO3(STO)或LaAlO3(LAO)衬底上生长晶体。磁和传输​​测量以及X射线衍射分析用于表征薄膜质量和性能。结果表明,离轴磁控溅射可用于高质量双层沉积。这样做的前提是抑制互扩散过程。这是通过降低沉积温度并缩短顶层的沉积时间来实现的。可以看到沉积在LAO基底上的LSMO膜的晶格弛豫。已证明沉积后退火或其他顶层沉积会扩大下部LSMO膜的松弛部分。 LSMO薄膜光滑且无瑕疵,并且由于失配位错的形成而部分缓解了应力。对于YBCO薄膜,SEM,XRD,EDX和磁化特征表明,当单元素氧化物晶体开始生长到薄膜中时,薄膜晶格弛豫开始。许多实验表明,应变层的临界厚度约为30 nm,此后,YBCO膜的顶部松弛。尽管由于相互扩散而造成的成分偏差很小,但YBCO / LSMO双层膜仍具有足够高的传输和磁性,可将其应用于研究从FM膜向SC膜注入自旋极化的准粒子。如果YBCO膜是底层,则其临界电流为J(c)类似于0.7 x 10(6)A / cm(2),而J(c)类似于1.7 x 10(6)A / cm(2) )如果YBCO是顶层,而我们的最佳单层YBCO膜在77 K时的J(c)类似于(2.5-5)x 10(6)A / cm(2)。(C)2002 Elsevier Science Ltd 。 版权所有。 [参考:11]

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