The preparation of transparent electrically conducting indium oxide films by reactive vacuum evaporation

摘要

Indium oxide thin films deposited by reactive thermal evaporation of indium in an oxygen atmosphere at different substrate temperatures and oxygen partial pressures are characterized by X-ray diffraction, scanning electron microscopy, optical transmission and electrical resistivity. Preparation conditions are optimized to obtain highly transparent and conducting In↓(2)O↓(3) films. # 1997 Elsevier Science Ltd. All rights reserved