A study on the optimal fabrication method for micro-scale gyroscopes using a hybrid process consisting of electric discharge machining, chemical etching or micro-mechanical milling

摘要

For productive manufacturing of an accurate small-scale wine-glass gyroscope, a hybrid fabrication process consisting of either electric discharge machining, chemical etching, or micro-mechanical milling have been proposed. A comparison of silicon cavity fabrication processes has been conducted in terms of productivity, quality and geometrical accuracy, aiming at the use of the cavity as a mold for creating a thin wall diamond hemisphere, which is the main component of a wine-glass gyroscope. The results have shown that the EDM process, combined with chemical etching, can yield the highest productivity but with limited shape accuracy. The use of mechanical micro-milling, while less productive than EDM and etching, produces a superior quality and geometric accuracy.