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Modeling and mitigation of pad scratching in chemical-mechanical polishing

机译:化学机械抛光中垫划痕的建模和缓解

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摘要

Past research has investigated an electroplastic effect for metals, i.e., decreased flow stress and increased elongation, caused by an applied electrical current aiding dislocation motion. There could be a connection between such electrically-assisted forming (EAF) processes and electromagnetic forming (EMF), where induced eddy currents are generated in the workpiece. To investigate this, Kolsky bar experiments with controlled, electrical DC current applied were conducted. Validated temperature values were calculated to assure that variations in resistive heating were determined. The results for current densities up to 180 A/mm~2 show that at these high deformation rates, an electroplastic effect is not observed.
机译:过去的研究已经研究了金属的电塑性效应,即,由于施加的电流辅助位错运动而导致的流动应力减小和伸长率增大。这种电辅助成型(EAF)过程和电磁成型(EMF)之间可能存在联系,在工件中会产生感应涡流。为了对此进行研究,我们进行了施加受控直流电电流的Kolsky条形实验。计算验证的温度值以确保确定电阻加热的变化。电流密度高达180 A / mm〜2的结果表明,在如此高的变形速率下,未观察到塑性效应。

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