Emission Characteristics and Plasma Parameters of Short Glow Discharge in Argon-Elegas Mixture

摘要

Results are presented of study of electrical and optical characteristics of plasma of short glow discharge in the spherical-anode-plane-cathode electrode system at an interelectrode gap of 3 cm. Low-pressure (p = 150-1500 Pa) Ar-SF_6 mixtures are investigated. Optimal conditions are revealed of the discharge radiation within the argon fluoride waveband with the maximum at 193 nm. The electron kinetic coefficients are calculated for 92 : 8 and 99 : 1 Ar-SF_6 mixtures; these mixtures are used in gas-discharge exciplex lamps.