EMISSION CHARACTERISTICS OF A GLOW DISCHARGE PLASMA BASED ON A MIXTURE OF HELIUM WITH CHLORINE MOLECULES

摘要

We present the results of a study of the emission characteristics of a longitudinal glow discharge based on a mixture of helium and chlorine. Study of the emission characteristics of the discharge showed that it emits most efficiently in the bands of the chlorine molecule with maxima at 200 nm and 258 nm in an He-Cl{sub}2 mixture (P = 0.2-0.3 kPa). We present the optimization of the average emission power of a UV emitter as a function of the glow discharge parameters, the pressure, and the composition of the working gas mixture. Based on solution of the Boltzmann equation for the electron energy distribution function in a discharge based on the optimal mixture (according to experimental data), we calculated the power losses per unit pressure going toward elementary processes, the electron transport characteristics, the ionization and attachment coefficients as a function of the parameter E/P. The calculated parameters of the plasma for the UV emitter allowed us to provide a basis for the qualitative pattern of physicochemical processes in the studied plasma.