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首页> 外文期刊>Wear: an International Journal on the Science and Technology of Friction, Lubrication and Wear >Friction and wear of rotating pivots in MEMS and other small scale devices
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Friction and wear of rotating pivots in MEMS and other small scale devices

机译:MEMS和其他小型设备中旋转枢轴的摩擦和磨损

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摘要

Micro-electromechanical systems (MEMS) is a rapidly growing interdisciplinary technology dealing with the design and manufacture of miniaturised machines or moving (or micro) mechanical assemblies (MMAs) with major dimensions at the scale of tens, to perhaps hundreds, of microns. Because they depend on the cube of a representative dimension, component masses and inertia rapidly become small as size decreases whereas surface or tribological effects, which scale with the square of dimension, become increasingly important. In this paper, the effects of design, material properties and applied operating conditions on the evolution of both friction forces and dimensional and volumetric wear rates are explored for normally loaded rotating pivots of various geometries. It is demonstrated that if such MEMS-MMAs are to have acceptable lifetimes then loaded contacting surfaces will need to be of inherently low wear material pairings. The difference in scale between these small devices and conventional wear testing rigs also creates problems in matching conditions between micro- and macro-situations and suggests that wear data might usefully be obtained from suitably designed MEMS devices acting as miniature wear test machines.
机译:微机电系统(MEMS)是一种快速发展的跨学科技术,用于设计和制造小型机械或移动(或微型)机械组件(MMA),其主要尺寸在几十到几百微米的范围内。因为它们取决于代表性尺寸的立方,所以随着尺寸的减小,组件的质量和惯性迅速变小,而与尺寸的平方成比例的表面或摩擦学效应变得越来越重要。在本文中,探讨了各种几何形状的正常负载旋转枢轴的设计,材料特性和应用的操作条件对摩擦力以及尺寸和体积磨损率的演变的影响。已经证明,如果这样的MEMS-MMA要具有可接受的寿命,那么负载的接触表面将必须具有固有的低磨损材料对。这些小型设备与常规磨损测试设备之间的规模差异也给微观和宏观环境之间的匹配条件造成了问题,并表明磨损数据可能有用地从适当设计的用作微型磨损测试机的MEMS设备获得。

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