In-process measurement of surface roughness using light scattering

摘要

This article presents an instrument applicable to in-process measurement of surface roughness. In theprocess a grinding machine is used. In the first experiment surfaces in the roughness area of 0.09μm≤R≤0.16μm were measured, in the second 3.0μm≤R ≤3 4μm. The instrument is basedon light scattering and the roughness of the surfaces is classified in the same order as when using astylus instrument. The method presented here is generally applicable, i.e., more rough surfaces canbe measured if a laser with appropriate wavelength and a detector sensitive to that wavelength ischosen.