Magnetic properties of carbonitride films elaborated by plasma enhanced chemical vapor deposition~1

摘要

Several amorphous carbonitride films have been elaborated by plasma enhanced chemical vapor deposition. A redio frefquency discharge has been used under standard conditions with different graphitic nitrogenated compounds. It is shown that the influence of molecular precursor is important concerning in particular the magnetic properties. The films issued from pyrrole and cyanuric chloride exhibit a large number of spins. However, in contrast to previous works ,no cooperative magnetic effects have been found at very low temperature.Finally, it is argued that a further heat-treatment at 1000 deg C of a film, prepared from cyanuric chloride,seems to lead to a crystalline phase of C_3N_4.