A Novel Turbomolecular Pump for R&D and Analytical Applications - General Remarks on Development and Applications

摘要

Turbomolecular pumps are high-vacuum pumps which are used both for attaining very low ultimate pressures down to 10~(-10) mbar and for handling of high process gas flows up to inlet pressures of 10~(-3) mbar. Pumping speed and compression of these pumps essentially depend on the diameter of the inlet flange, on the design and rotational speed of the rotor and the Holweck stage respectively, and on gas type of the gases to be pumped. The development of the novel TURBOVAC i/iX turbomolecular pump by Oerlikon Leybold Vacuum aimed at the realization of high pumping speeds and high compression ratios, especially for light gases. Both the rotor design and the bearing concept were particularly adapted to these requirements, also by using modern computer simulation tools. This design concept has already proven its functionality in R&D and analytical applications.