Micro/Nanotribological and Mechanical Studies of TIN Thin-Film for MEMS Applications

摘要

Microanotribological and mechanical characterization of TiN film and single-crystal silicon was investigated. Hardness, friction, and wear properties of both materials were measured by a nanoindenter system. The results demonstrate the similarities and differences between both materials and show that TiN film has more preferable properties in hardness and wear resistance than those of single-crystal silicon. It is more likely that a methodology based on this study can be used for evaluating the quality of microanofilms, and TiN film possesses desirable microanotribological and mechanical characterization for MEMS applications.