Tribological characterization of chemical vapor deposited Co and Co3O4 thin films for sensing reliability in engineering applications

Koumoulos Elias P.; Markakis Vassileios; Tsikourkitoudi Vasiliki P.; Charitidis Costas A.; Papadopoulos Nikolaos; Hristoforou Evangelos

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Tribological characterization of chemical vapor deposited Co and Co3O4 thin films for sensing reliability in engineering applications

机译：化学气相沉积Co和Co3O4薄膜的摩擦学表征，可感测工程应用中的可靠性

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In the present study, nanoindentation and nanoscratch techniques are applied in order to obtain the nanomechanical properties (hardness, H, and elastic modulus, E) of chemical vapor deposited Co and Co3O4 thin films (promising candidates for magnetic sensing and data storage applications) and evaluate the functionality of the thin film-substrate system. A wear analysis is also performed based on the H/E ratio. (C) 2014 Elsevier Ltd. All rights reserved.

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《Tribology International》 |2015年第1期|共6页
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Koumoulos Elias P.; Markakis Vassileios; Tsikourkitoudi Vasiliki P.; Charitidis Costas A.; Papadopoulos Nikolaos; Hristoforou Evangelos;
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正文语种 eng
中图分类机械摩擦、磨损与润滑;
关键词
Cobalt oxide; Thin films; Nanoindentation; Coefficient of friction;

机译：氧化钴;薄膜;纳米压痕;摩擦系数;

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1. Tribological characterization of chemical vapor deposited Co and Co3O4 thin films for sensing reliability in engineering applications [J] . Koumoulos Elias P., Markakis Vassileios, Tsikourkitoudi Vasiliki P., Tribology International . 2015,第Pta1期

机译：化学气相沉积Co和Co3O4薄膜的摩擦学表征，可感测工程应用中的可靠性
2. Effects of Substrate Bias on Tribological Properties of Diamondlike Carbon Thin Films Deposited Via Microwave-Excited Plasma-Enhanced Chemical Vapor Deposition [J] . Khun Nay Win, Neville Anne, Kolev Ivan, Journal of Tribology . 2016,第3期

机译：衬底偏压对微波激发等离子体增强化学气相沉积法沉积类金刚石碳薄膜摩擦学性能的影响
3. Synthesis and Characterization of Metal Organic Chemical Vapour Deposited Chromium Doped Zinc Oxide Thin Film for Gas Sensing Applications [J] . Olumide Oluwole Akinwunmi, Olakunle A. Akinwumi, Johnson Ayodele O. Ogundeji, Materials Sciences and Applications . 2018,第10期

机译：气敏应用金属有机化学气相沉积铬掺杂氧化锌薄膜的合成与表征
4. Growth, Structural and Mechanical Characterization and Reliability of Chemical Vapor Deposited Co and Co_3O_4 Thin Films as Candidate Materials for Sensing Applications [C] . Vasiliki P. Tsikourkitoudi International Conference on Materials and Applications for Sensors and Transducers . 2012

机译：化学气相沉积CO和CO_3O_4薄膜的生长，结构和机械表征和可靠性作为传感应用的候选材料
5. Synthesis, doping and characterization of chemical vapor deposited polycrystalline diamond and nanostructured carbon thin films for electronic applications. [D] . Gupta, Sanju. 2002

机译：用于电子应用的化学气相沉积多晶金刚石和纳米结构碳薄膜的合成，掺杂和表征。
6. Synthesis and Characterization of High c-axis ZnO Thin Film by Plasma Enhanced Chemical Vapor Deposition System and its UV Photodetector Application [O] . Chung-Hua Chao, Da-Hua Wei 2015

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Tribological characterization of chemical vapor deposited Co and Co3O4 thin films for sensing reliability in engineering applications

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