Approach to recovery of fatigue damage for copper film by pulsed laser irradiation

摘要

Based on pulsed laser irradiation processing, an approach to the recovery of fatigue damage was investigated by an excimer laser for copper film with thickness of 25 μm. First, optimal parameters of laser irradiation were identified by the obtained fatigue life results under different laser treatment conditions. Then, the specimens with different amounts of fatigue damage were treated by the obtained optimal laser parameters. The results showed that the copper film can show a good degree of hardening and a smooth surface feature after the specimen surface was slightly melted by the laser irradiation, which makes the residual fatigue life be extended. When fatigue damage is less than 70%, the damage can be recovered by pulsed laser irradiation treatment. The obtained residual fatigue life of specimens is about 6 times that of no laser treatment.