Controlled biaxial deformation of nanostructured W/Cu thin films studied by X-ray diffraction

摘要

The deformation behaviour of 150. nm thick W/Cu nanocomposite deposited on polyimide substrates has been analysed under equi-biaxial tensile testing coupled to X-ray diffraction technique. The experiments were carried out using a biaxial device that has been developed for the DiffAbs beamline of SOLEIL synchrotron source. Finite element analysis has been performed to study the strain distribution into the cruciform shape substrate and define the homogeneous deformed volume. X-ray measured elastic strains in tungsten sub-layers could be carried out for both principal directions. The strain field was determined to be almost equi-biaxial as expected and compared to finite element calculations.