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CVD diamond coating of steel on a CVD-TiBN interlayer

机译:CVD-TiBN夹层上钢的CVD金刚石涂层

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摘要

Adherent and homogeneous diamond films were deposited on 41Cr4 steel substrates employing chemical vapor deposited (CVD) TiBN interlayers. The suitability of CVD-TiBN interlayers for diamond deposition was investigated. The CVD intermediate layers showed excellent barrier properties against the diffusion of iron from the bulk substrate to the surface and against diffusion of carbon from gas phase during diamond deposition. Various growth conditions for interlayers affect their thickness and composition. For these samples different shares in the phases TiB2 and TiN were analyzed by XRD. The diamond coating onto the TiBN interlayer showed very good adhesion. The measured Raman spectra proved high compressive stresses in the diamond film with a high diamond quality. Sandblasting tests indicated an enormous improvement of the erosion resistance after diamond deposition on 41Cr4 substrates with a 5 mu m intermediate layer of TiBN. (c) 2006 Elsevier B.V. All rights reserved.
机译:使用化学气相沉积(CVD)TiBN中间层将粘附均匀的金刚石膜沉积在41Cr4钢基底上。研究了CVD-TiBN中间层对金刚石沉积的适用性。 CVD中间层在金刚石沉积过程中显示出优异的阻隔性能,可防止铁从块状基材扩散到表面,以及防止碳从气相扩散。中间层的各种生长条件会影响其厚度和组成。对于这些样品,通过XRD分析了TiB2和TiN相的不同份额。 TiBN夹层上的金刚石涂层显示出非常好的附着力。测得的拉曼光谱证明了金刚石膜中具有高金刚石质量的高压缩应力。喷砂测试表明,金刚石沉积在具有5μmTiBN中间层的41Cr4基底上后,耐蚀性有了极大的提高。 (c)2006 Elsevier B.V.保留所有权利。

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