A study of single kinematic errors accurate fitting for ultra-precision micro v-groove machine tools

摘要

V-groove structure is extensively used for planar optical-fiber alignment, and its quality is critical to the functionality of the fiber connector. The core pitch of v-groove structure is the most important machining parameter, which determines the v-groove quality. And its machining precision is dominated by the machine tool motion precision in the z-axis direction. Six single kinematic errors derived from the multi-body system theory are the main factors affecting the accuracy of the machine tool motion in the z-axis direction. Therefore, this paper presents a single kinematic errors accurate fitting methodology for the micro v-groove machine tools. A function is fitted with a set of data using the existing fitting method and verified by another set of data measured at other testing points. Each set of test points have the same intervals, but their starting points are different from each other. The fitted function is constantly upgraded in the process of the verification. And the accurate fitted function is finally obtained by the recycling verification process. The results show that the accurate fitting method is effective and practical.