超精密静压支承部件及其在超精密加工机床的应用

摘要

Ultra precision machining technique and equipment have developed greatly in recent years. Ultra precision hydrostatic bearing component is a key common component of ultra-precision processing equipment. The structure characteristics, technical proper-ties and application situation of hydrostatic/aerostatic bearing spindle, guide-way and rotary table were introduced roundly. A typical ul-tra-precision machine tool was taken as an example to present the application of the ultra precision hydrostatic/aerostatic bearing spin-dle, guide-way and rotary table.%超精密加工技术与装备在近年得到极大发展. 超精密静压部件是超精密加工装备关键共性部件. 以平面气体静压支承为例, 介绍了静压支承基本工作原理. 对超精密液体/气体静压主轴、 导轨和转台的结构特点、 技术特性、 应用场合作了较全面的介绍; 以典型超精密加工机床为例, 介绍静精密静压主轴、 导轨和转台在超精密加工机床中的应用.