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Statistical process control: implementation issues in semiconductor manufacturing

机译:统计过程控制:半导体制造中的实施问题

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One measure of a successful manufacturing operation is the level of maturity of the factory's statistical process control (SPC) system. This is often an indicator of the quality of workmanship, skill level of the personnel and maturity of the organization. Success in semiconductor manufacturing therefore, is highly dependent on the effective use of SPC principles. In this paper, SPC maturity is defined by five modes with the highest mode (Improvement) achieved by focusing on fifteen common mistakes and increasing the level of maturity of the factory's SPC system.
机译:成功的制造操作的一种衡量标准是工厂统计过程控制(SPC)系统的成熟程度。这通常是工艺质量,人员技能水平和组织成熟度的指标。因此,半导体制造的成功很大程度上取决于SPC原理的有效使用。本文将SPC成熟度定义为五个模式,其中最高模式(改进)通过关注15个常见错误并提高工厂SPC系统的成熟度来实现。

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