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Full X-ray pattern analysis of vacuum deposited pentacene thin films

机译:真空沉积并五苯薄膜的全X射线图分析

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Pentacene thin films with thicknesses ranging from 10 nm to 180 nm are investigated by specular X-ray diffraction in the reflectivity regime and in the wide angular regime. The results of the reflectivity measurements show a clear shift of the 001 reflection of the thin film phase depending on the layer thickness. It is shown that this shift can be explained by the dynamical scattering theory. The wide angular regime measurements show the 00L of the thin film phase. Williams-Hall plots are used to extract information on the crystallite size and mean micro strain of the thin film phase. The crystallite size is in good agreement with the results obtained by the reflectivity measurements. From this it can be concluded that the thin film phase crystallites are extended over the entire film thickness down to the substrate. Additionally an increase of the micro strain with increasing film thickness is observed.
机译:通过镜面X射线衍射在反射率范围和广角范围内研究厚度为10nm至180nm的并五苯薄膜。反射率测量的结果表明,薄膜相的001反射明显取决于层厚度。结果表明,这种位移可以用动力学散射理论来解释。广角状态测量显示薄膜相为00L。 Williams-Hall图用于提取有关微晶尺寸和薄膜相平均微应变的信息。微晶尺寸与通过反射率测量获得的结果非常吻合。由此可以得出结论,薄膜相微晶在整个膜厚上一直延伸到基底。另外,观察到微应变随着膜厚度的增加而增加。

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