A self-decoupled inelastic style piezoelectric three-degrees-of-freedom (three-DOF) accelerometer is put forward for the solution of cross coupling interference without decoupling easily in the field of three-DOF acceleration sensing. Meanwhile, the proposed piezoelectric three-DOF accelerometer has simple structure and solves the contradictions between high stiffness and high sensitivity. The operating principle of the presented piezoelectric three-DOF accelerometer is analyzed, and its structure model is constructed. The numerical simulation model (finite element model) of the three-axis accelerometer is established. Piezoelectric quartz is chosen for the acceleration sensing element and conversion element, and its output sensitivity, static characteristics, dynamic natural frequency, etc. are analyzed by FEM tool (ANSYS software). Research results show that the proposed piezoelectric three-DOF accelerometer has advantages of simple and rational structure, correct sensing principle and mathematic model, good linearity, high rigidity, and theoretical natural frequency is more than 16 kHz, self-decoupled without complex decoupling work.
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