Micropatterning of Organic-Inorganic Hybrid Film Using Photosensitive Sol-Gel System Consisting of Double-decker-shaped Multifunctional Silsesquioxane

摘要

The micropatterning of an organic-inorganic hybrid film consisting of a double-decker-shaped multifunctional silsesquioxane was achieved using a photosensitive sol-gel system containing a titanium alkoxide modified with beta-diketone.Negative patterns with a high-resolution of ca.1 mu m were obtained by UV-irradiation.