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Electrodeposition: A Bright (But Perhaps Not Chrome-Plated) Future

机译:电沉积:光明的(但可能不是镀铬的)未来

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摘要

Here is the good news, folks! Electrodeposition is not just for breakfast anymore. No, no, no! We are coming out of the dark ages, into the light! Someone loves us and it is not our mothers! What am I talking about? To me, traditional electrodepo-sition harks back to images of a hunchback in a dark warehouse, stooped over boiling vats of cyanide and acid, bringing the world the largest selection of cheap jewelry, Harley Davidson parts, and car bumpers. We still need cheap jewelry and Harley parts, but chrome-plated car bumpers are a thing of the past in this plastics and environmentally-responsible age. The way I see it, modern electrode-position is one of the best methods for the formation of a dazzling array of high quality materials and structures: from electroforming space shuttle engines to the deposition of nanos-tructured films, wires, and crystals. The electronics industry has accepted electrodeposition as a full-fledged member of its construction tool box. For years it has been using electrode-position for the formation of hard disk heads. It has now grown into the area of packaging (C4 solder bumps), and to being the method of choice for forming the tiny wires that connect transistors in ultra-large scale integration (ULSI) for the formation of microprocessors. We have two views of this technology in this issue, one from the tool maker's side, from John Dukovic (the 2004 winner of the Electrodeposition Division Research Award), who discusses how modern electroplating is performed in the semiconductor foundries. The other is from Tom Moffat on why electrodeposition works so well for filling up the nanoscale trenches used as interconnects in microprocessors. The process involves bottom-up filling, which is very hard to accomplish with classic deposition methods such as chemical vapor deposition (CVD).
机译:伙计们,这是个好消息!电沉积不再只是早餐。不不不!我们正从黑暗时代走入光明!有人爱我们,不是我们的母亲!我在说什么对我而言,传统的电沉积技术使人联想起在黑暗仓库中的驼背的图像,弯腰被沸腾的氰化物和酸桶所笼罩,为世界带来了最多的廉价珠宝,哈雷戴维森零件和汽车保险杠。我们仍然需要便宜的珠宝和Harley零件,但是在这个塑料和对环境负责的时代,镀铬汽车保险杠已成为过去。我的看法是,现代电极定位是形成令人眼花of乱的高质量材料和结构的最佳方法之一:从电铸航天飞机发动机到纳米结构薄膜,金属丝和晶体的沉积。电子行业已经接受电沉积作为其构造工具箱的正式成员。多年来,它一直使用电极位置来形成硬盘磁头。现在它已经发展到封装(C4焊料凸点)领域,并成为形成超细导线的首选方法,这些超细导线以超大规模集成(ULSI)的形式连接晶体管以形成微处理器。在本期中,我们对此技术有两种看法,一种是从工具制造商的角度出发,另一种是John Dukovic(2004年获得电子沉积事业部研究奖的得主),他讨论了如何在半导体铸造厂中进行现代电镀。另一个来自汤姆·莫法特(Tom Moffat),他解释了为什么电沉积能很好地填充微处理器中用作互连的纳米级沟槽。该过程涉及自下而上的填充,这很难用经典的沉积方法(例如化学气相沉积(CVD))来完成。

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